IonTamer™ FA is a time-of-flight residual gas analyzer (TOF-RGA) that monitors the composition of gases in real time, at high resolution, and with excellent sensitivity. As the world’s best performing RGA, IonTamer™ FA brings performance levels to industrial & research vacuum facilities that were previously available only in benchtop laboratory instruments.
Applications include manufacturing of semiconductors and OLED displays, as well as vacuum coating processes (CVD, PVD, ALD) and research in environmental sciences.